Detailed Raman Study of DLC Coating on Si (100) Made by RF-PECVD
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چکیده
منابع مشابه
Deposition and patterning of diamondlike carbon as antiwear nanoimprint templates
In this work, antiwear nanoimprint templates were made by depositing and patterning diamondlike carbon DLC films on Si and quartz. A capacitively coupled plasma enhanced chemical vapor deposition PECVD system was configured to deposit 100 nm–1 m thick DLC films on Si and quartz substrates. These films were characterized with Raman spectroscopy, electron energy loss spectroscopy, atomic force mi...
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Diamond-like carbon (DLC) is a metastable form of amorphous carbon having large sp 3 bonding. DLC films have unique properties such as high hardness, low-friction, good transparency in IR region, chemical inertness and biocompatibility. To have better performance of the coating one should have proper selection of different parameters for deposition. In the present study, DLC films were deposite...
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Thick DLC Films Deposited By PECVD on the Internal Surface of Cylindrical Substrates
A new and exciting technique for performing DLC deposition on the inside of cylindrical substrates, in particular pipes, will be described. Using the hollow cathode effect (HCE), a high density plasma can be generated within such cylindrical substrates by using Plasma Enhanced Chemical Vapor Deposition (PECVD). As the pipe itself is the vacuum chamber, such high density plasmas can be maintaine...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2014
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2014.12.428